Abstract: The analysis of Ge, Se and Te requires that samples be dissolved by two different acid systems of HNO₃-HF-HClO₄-H₃PO₄ and HNO₃-HF-HClO₄, and determined by Atomic Fluorescence Spectrometry (AFS) and Inductively Coupled Plasma-Mass Spectrometry (ICP-MS). This method is expensive and has a low efficiency for large quantities of geological samples. A method for determination of Ge, Se and Te in the same solution by using HNO₃-HF-HClO₄ acid system with ICP-MS has been developed. By this method, the sample solutions are extracted with 50% nitric acid, and 3% ethanol added. In order to avoid alcohol volatilization in the secondary dissolved solution, the concentration of ethanol is the optimal value for the best sensitization. No HCl was used for sample decomposition, avoiding the loss of Ge and Te by chloride ion. The sensitivities of Se and Te in 3% Nitrate-3% ethanol medium were increased by 2.2 and 3.7 times, respectively. The difficult ionization and low sensitivity for Se and Te by ICP-MS was also overcome by using this method, which improved the method's stability. CCT eliminated the interferences of polyatomic ions of argon on Se, and improved the accuracy of the method. This method was verified by determine Standard Reference materials, and the results are in agreement with the certified values with precision of less than 10% RSD (n=4). This method can be used for the rapid determination of Ge, Se and Te in geological samples and has the advantages of simple preparation and high analysis efficiency.