Abstract: Microwave digestion simplifies the pretreatment of biological samples with satisfactory digestion effect. Combined with microwave digestion, 14 micro-amount of elements including Cu, Pb, Zn, Cd, Co, Cr, Ni, Li, Mo, B， Be, Th, Tl, U were determined by inductively coupled plasma-mass spectrometry (ICP-MS). Analytical conditions of microwave digestion and ICP-MS measurement were optimized through experiments. The analytical results for rice and cabbage National Standard Reference materials are in agreement with certified values with precision of less than 6%RSD (n＝4).