Abstract: The principle and development of low temperature analytical techniques for fluid inclusions were expounded. The traditional lowtemperature analytical technology mainly focused on the measurement of inorganic salt using congealed microthermometry, but now it is developed to semi-quantitative and quantitative analysis of fluid inclusions using in situ cryogenic Raman spectrometry. The in situ cryogenic technology for oil and gas analysis also made a breakthrough in study on phase transition at low temperature and the process of phase transition of oil and gas inclusions with different components at low temperature were acquired. In the light of the process of phase transition, oil and gas inclusions were classified and the primary components of the inclusions could also be presumed. More component information of oil and gas inclusions could be obtained further when in situ cryogenic Raman spectrometry was used. Some basic parameters for quantitative study on oil and gas inclusions could be provided.