Abstract: High purity titanium and titanium alloy have good plasticity, but with the presence of impurity, their performance will become brittle and hard. The accurate quantitative analysis of impurity elements is useful for carrying on the quality control of titanium products. For analysis of impurity elements, in the current national standard method, DC Arc was used as an excitation source with a higher evaporation temperature, the spectrograph process includes developing, fixing, blackness measurement and other steps, the procedure is too complicated and tedious with large measurement error. In this paper, DC Arc Atomic Emission Spectrometer (wavelength range of 200-800 nm) equipped with echelle grating and charge-coupled detector (CCD) is applied, the spectral lines interference analysis and spectral intensity measurement can be conducted at the same time, and the instrument provides more spectral information. Based on this, a rapid analysis method for 10 trace elements (Mn, Sn, Cr, Ni, Al, Mo, V, Cu, Zr, Y) in titanium and titanium alloy was been established. In the process of experiments, four types of spectral interference from titanium matrix, added chemical component elements, iron and impurity elements were studied, and the appropriate analytical were determined. Meanwhile, through application of a kind of shallow, thin and narrow cup-shaped electrode as working electrode, evaporation of sample was improved. With a mixture of AgCl and carbon powder used as buffer, the spectral line intensity of the measured elements was increased. The detection range of the method is 0.001%-0.06%, the precision is less than 15%, the recoveries are 90.0%-110.0%. The method is suitable for simultaneous determination of impurity elements in large quantities of titanium and titanium alloy samples.