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双极端对比检测法定量分析高纯石英砂气液包裹体含量

Quantitative Analysis of Gas-Liquid Inclusions in High Purity Quartz Sand by Double Extreme Case Detection Method

  • 摘要: 高纯石英砂作为半导体、光伏等战略新兴行业的关键材料,其质量对单晶硅坩埚、石英管等产品的应用至关重要。除杂质元素外,气液包裹体是影响高纯石英质量的重要因素之一,但目前对石英气液包裹体的检测方法多为定性描述,缺乏高效精确的定量分析手段。本文提出了一种双极端对比(Double Extreme Case Analysis,DECA)检测法,能够快速、定量评估气液包裹体含量。具体流程包括:将药剂浸泡石英砂片置于显微镜下观察并拍摄,总计获取不少于300个石英砂颗粒的显微照片,其中石英砂呈透明状,而气液包裹体呈黑色,通过图像统计计算得到石英砂通透颗粒(T)和不通透颗粒(NT)比例两个数据,以此来评价石英砂品质。通过研究不同石英砂DECA检测结果及坩埚能力。结果表明,T比例较高、NT比例较低的石英砂制备的坩埚透明度优良;而T比例较低、NT比例较高的石英砂制品透明层质量显著下降。该方法有效地解决了气液包裹体检测中定量化不足的难题,为高纯石英砂品质评估提供了可靠依据。

     

    Abstract: High-purity quartz sand serves as a critical material in various strategic emerging industries, such as semiconductors and photovoltaics. The quality of quartz sand is crucial for the application of products like single crystal silicon crucibles and quartz tubes. Besides impurity elements, gas-liquid inclusions are a significant factor affecting quartz quality. However, current detection methods for gas-liquid inclusions are mainly qualitative, lacking efficient and precise quantitative analysis techniques. This paper innovatively proposes the Double Extreme Case Analysis (DECA) method to quantitatively assess the content of gas-liquid inclusions. The process involves the quartz sand slices treated with the reagent were put under the microscope for observation and photographing, obtaining at least 300 images of quartz particles where the quartz appears transparent and the inclusions appear black. By statistically analyzing the images, the ratio of transparent (T) to non-transparent (NT) particles is calculated to evaluate quartz quality. The study of different quartz sands using DECA and crucible testing shows that quartz with a higher T ratio and lower NT ratio produces crucibles with excellent transparency, while quartz with a lower T ratio and higher NT ratio results in poor transparency. This method effectively addresses the challenge of quantitative gas-liquid inclusion detection and provides a reliable basis for evaluating high-purity quartz sand quality.

     

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